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1.

Plasma Electronics Applications in Microelectronic Device Fabrication

Plasma Electronics Applications in Microelectronic Device Fabrication by Makabe, T., Petrovic, Z. ISBN: 9780750309769 List Price: $167.95

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2.

Advances in Low Temperature Rf Plasmas Basis for Process Design

Advances in Low Temperature Rf Plasmas Basis for Process Design by Makabe, T. ISBN: 9780444510952 List Price: $152.00

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3.

Plasma Electronics : Applications in Microelectronic Device Fabrication

Plasma Electronics : Applications in Microelectronic Device Fabrication by Makabe, T., Petrovic�, Z., ... ISBN: 9781420012279

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