Interlayer Dielectrics for Semiconductor Technologies

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.Muraka, Shyam P. is the author of 'Interlayer Dielectrics for Semiconductor Technologies', published 2004 under ISBN 9780125112215 and ISBN 0125112211.