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9780127282503

Thin Film Processes - John L. Vossen - Hardcover

Thin Film Processes - John L. Vossen - Hardcover
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  • ISBN-13: 9780127282503
  • ISBN: 0127282505
  • Publisher: Elsevier Science & Technology Books

AUTHOR

Vossen, John L., Kern, Werner

SUMMARY

Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.Vossen, John L. is the author of 'Thin Film Processes - John L. Vossen - Hardcover' with ISBN 9780127282503 and ISBN 0127282505.

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