Handbook of Silicon Wafer Cleaning Technology

Karen A. Reinhardt is Principle Consultant at Cameo Consulting in San Jose, California. Currently, Karen works with start-up cleaning companies to develop their technology for acquisition. Prior to forming a consulting company, Karen was employed at Novellus Systems, in this role she was responsible for investigating new cleaning technologies that allows realization of the ITRS roadmap with respect to smaller geometries, new materials, and the environmental issues associated with current processes. Karen also worked at AMD and Cypress Semiconductor as a process development engineer. Karen has published over 30 technical papers on plasma processing, damage characterization and cleaning technology assessment. She has been awarded seven patents. Karen is currently co-leading the ITRS Surface Prep Technical Working Group.Reinhardt, Karen A. is the author of 'Handbook of Silicon Wafer Cleaning Technology', published 2007 under ISBN 9780815515548 and ISBN 0815515545.