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9780824787530

Ultraclean Technology Handbook Ultrapure Water

Ultraclean Technology Handbook Ultrapure Water
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  • Ships From: STERLING HEIGHTS, MI
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Product details

  • ISBN-13: 9780824787530
  • ISBN: 0824787536
  • Publisher: C R C Press LLC

AUTHOR

Ohmi, T.

SUMMARY

Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided intOhmi, T. is the author of 'Ultraclean Technology Handbook Ultrapure Water' with ISBN 9780824787530 and ISBN 0824787536.

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