by Vossen, John L., Kern, Werner

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ISBN-13: 9780127282510
ISBN: 0127282513
Publication Date: 1991
Publisher: Elsevier Science & Technology Books

AUTHOR

Vossen, John L., Kern, Werner

SUMMARY

This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques.Vossen, John L. is the author of 'Thin Film Processes II', published 1991 under ISBN 9780127282510 and ISBN 0127282513.

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