Reliability of Mems

The gateway to the micro and nano worlds: Advanced Micro & Nano-systems (AMN) provides cutting-edge reviews and detailed case studies by top authors from science and industry, covering technologies, devices and advanced system from the micro and nano worlds, which together have an immense innovative application potential that opens up with control of shape and function from the atomic level right up to the visible world without any technological gaps. In this topical volume, one of the most important hurdles to commercialization for microelectromechanical systems is covered in detail: the reliability of MEMS materials and devices. Due to their microscale size combined with novel functionalities, a whole new category of challenges arises, and proper determination of a given device's reliability is instrumental in determining its range of usability and application fields. Any kind of gadget's performance, lifetime and safety will depend on the continued and predictable functioning of both the electronic as well as the micromechanical parts. MEMS reliability therefore can be as serous as human life-and-death matters - quite literally in the case of roll-over sensors for cars, for example.Brand, Oliver is the author of 'Reliability of Mems ', published 2007 under ISBN 9783527314942 and ISBN 3527314946.