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9781461350637

Pulsed and Pulsed Bias Sputtering: Principles and Applications

Pulsed and Pulsed Bias Sputtering: Principles and Applications
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Product details

  • ISBN-13: 9781461350637
  • ISBN: 1461350638
  • Edition: Softcover reprint of the original 1st ed. 2003
  • Publication Date: 2014
  • Publisher: Springer

AUTHOR

Edward V. Barnat, Toh-Ming Lu

SUMMARY

Edward V. Barnat is the author of 'Pulsed and Pulsed Bias Sputtering: Principles and Applications', published 2014 under ISBN 9781461350637 and ISBN 1461350638.

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