39729307
9781461350637
Pulsed and Pulsed Bias Sputtering: Principles and Applications
by Edward V. Barnat, Toh-Ming Lu
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- Provider: LightningBooks
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About this item
- Condition: Good
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- Ships From: Multiple Locations
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Product details
- ISBN-13: 9781461350637
- ISBN: 1461350638
- Edition: Softcover reprint of the original 1st ed. 2003
- Publication Date: 2014
- Publisher: Springer
AUTHOR
SUMMARY
Edward V. Barnat is the author of 'Pulsed and Pulsed Bias Sputtering: Principles and Applications', published 2014 under ISBN 9781461350637 and ISBN 1461350638.
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