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3528041

9780819456601

Principles of Lithography

Principles of Lithography
$100.19
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  • Ships From: STERLING HEIGHTS, MI
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Product details

  • ISBN-13: 9780819456601
  • ISBN: 0819456608
  • Edition: 2
  • Publication Date: 2005
  • Publisher: SPIE

AUTHOR

Levinson, Harry J.

SUMMARY

This is an introduction to the science of microlithography. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.Levinson, Harry J. is the author of 'Principles of Lithography', published 2005 under ISBN 9780819456601 and ISBN 0819456608.

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