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1430942

9781402012488

Principles of Chemical Vapor Deposition What's Going on Inside the Reactor?

Principles of Chemical Vapor Deposition What's Going on Inside the Reactor?
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Product details

  • ISBN-13: 9781402012488
  • ISBN: 1402012489
  • Publisher: Springer

AUTHOR

Dobkin, Daniel M., Zuraw, Michael K.

SUMMARY

This book will assist workers new to chemical vapor deposition (CVD) to understand CVD reactors and processes and to comprehend and exploit the literature in the field.Dobkin, Daniel M. is the author of 'Principles of Chemical Vapor Deposition What's Going on Inside the Reactor?' with ISBN 9781402012488 and ISBN 1402012489.

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