6839189
9780982299104
Kaajakari, Ville is the author of 'Practical MEMS: Analysis and design of microsystems, MEMS sensors (accelerometers, pressure sensors, gyroscopes), sensor electronics, actuators, RF MEMS, optical MEMS, and microfluidic Systems', published 2009 under ISBN 9780982299104 and ISBN 0982299109.
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