Polymers for Microelectronics Resists and Dielectrics

Name: Polymers for Microelectronics Resists and Dielectrics
Price: 25.00 USD
Availability: OutOfStock
ISBN: 9780841227217

by Thompson, Larry F., Wilson, C. Grant, Tagawa, Seiichi

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ISBN-13: 9780841227217
ISBN: 0841227217
Publisher: American Chemical Society

AUTHOR

Thompson, Larry F., Wilson, C. Grant, Tagawa, Seiichi

SUMMARY

Presents recent advances in chemically amplified resists for deep UV, electron beam, and X-ray advanced lithographic technologies. Discusses top surface imaging and dry development resists. Examines the fundamental chemistry of radiation-sensitive materials, including dielectric polymers for integrated circuits and interconnect systems. Valuable reading for polymer chemists, radiation chemists, and materials scientists.Thompson, Larry F. is the author of 'Polymers for Microelectronics Resists and Dielectrics' with ISBN 9780841227217 and ISBN 0841227217.

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