1406889
9780841230552
Polymeric Materials for Microelectronic Applications Science and Technology
by Ito, Hiroshi, Tagawa, Seiichi, Horie, Kazuyuki
About this item
- Condition: New
- Provider: Bookjunction
- Provider Rating: 73%
- Ships From: STERLING HEIGHTS, MI
- Shipping: Standard
- Comments: New, US edition. Satisfaction guaranteed!!
Product details
- ISBN-13: 9780841230552
- ISBN: 0841230552
- Publisher: American Chemical Society
AUTHOR
SUMMARY
Reports recent developments in polymer science and technology pertinent to microelectronics. Addresses such topics as photophysics and radiation physics and chemistry of polymers; photoresists, electron beam resists, and X-ray resists; insulating materials in microelectronics; photoresponsive materials; silicon-containing polymers; conducting polymers; and optoelectronic materials. Includes international contributions from both academia and industry.Ito, Hiroshi is the author of 'Polymeric Materials for Microelectronic Applications Science and Technology' with ISBN 9780841230552 and ISBN 0841230552.
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