1392701
9780124693708
Plasma Etching An Introduction
by Manos, Dennis M., Flamm, Daniel L.
31245
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- Condition: New
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About this item
- Condition: Good
- Provider: FriendsofPimaLibrary Contact
- Provider Rating: 80%
- Ships From: Tucson, AZ
- Shipping: Standard
- Comments: Hardcover. NOT Ex-library. Good condition. Slight edgewear and bumping. Previous owner's name inside front and back. Clean pages and tight binding. Until further notice, USPS Priority Mail only reliable option for Hawaii. Proceeds benefit the Pima County Public Library system, which serves Tucson and southern Arizona. N35
Product details
- ISBN-13: 9780124693708
- ISBN: 0124693709
- Publisher: Elsevier Science & Technology Books
AUTHOR
SUMMARY
Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.Manos, Dennis M. is the author of 'Plasma Etching An Introduction' with ISBN 9780124693708 and ISBN 0124693709.
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