Physics of Moire Metrology

The moir_ effect exhibits a fringe pattern formed by the superposition of two grid structures of similar period. The first proposal to use the moir_ effect for scientific purposes arose over 100 years ago, when Lord Rayleigh suggested using it for grating analysis. But only since J. Guild's book appeared in 1956 has the moir_ effect come under close study. In fact, to date, about 1,000 papers on the moir_ effect have appeared. The present book is the first on the physics of the moir_ effect. The authors put all the steps of the past 100 years together, for the first time, as one coherent piece, in order to establish moir_ technology as a chapter in the optics section of physics. They adopt a new point of view, treating the gratings used in moir_ analysis as an artificial analog to electromagnetic waves. In this way, moir_ analysis may be compared with conventional optical methods based on wave properties (i.e., interferometry). And it is shown that for every interferometric technique in metrology, there is an analogous one in moir_ technology, and vice versa. Moir_ deflectrometry is a relatively new method of optical metrology, complementary to the common interferometry technique of optical measurement-but the moir_ method is simpler and cheaper. The Physics of Moir_ Metrology explains the basis of this new metrological approach in straightforward language, and summarizes all the important moir_ techniques. Included is a summary of the applications of moir_ interferometry and moir_ deflectrometry to strain analysis. In addition, the book gives a complete analogy between interferometry, holographic interferometry, and moir_ techniques, from the mapping of diffusive objects to the analysis of phase objects and reflective surfaces. Over thirty metrological problems, on all types of objects that can be solved by moir_ techniques, are explained and demonstrated. There is also a survey of metrology studies carried out over the past ten years by the authors and their colleagues. The Physics of Moir_ Metrology should be of interest to physicists and engineers using optical metrology, and graduate and advanced undergraduate students of science and engineering.Kafri, Oded is the author of 'Physics of Moire Metrology' with ISBN 9780471509677 and ISBN 0471509671.