1383057
9780306441462
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.Brodie, Ivor is the author of 'Physics of Micro/Nano-Fabrication' with ISBN 9780306441462 and ISBN 0306441462.
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