1328391
9781402076206
This title presents a collection of optimization-based synthesis methods for microelectromechanical systems (MEMS). Chapters written by leading researchers cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric.Ananthasuresh, G. K. is the author of 'Optimal Synthesis Methods for Mems' with ISBN 9781402076206 and ISBN 1402076207.
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