5432806
9789812705426
Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as compenents, devices, or systems, in large quanitities at potentially low cost. This book examines this topic.Tseng, Ampere A. is the author of 'Nanofabrication Fundamentals and Applications', published 2007 under ISBN 9789812705426 and ISBN 9812705422.
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