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9783540002529

Modelling of Microfabrication Systems

Modelling of Microfabrication Systems
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  • ISBN-13: 9783540002529
  • ISBN: 3540002529
  • Publisher: Springer

AUTHOR

Nassar, Raja, Dai, Weizhong

SUMMARY

Focusing on high aspect ratio microtechnology, this volume addresses the modelling of systems that are crucial to the fabrication of three-dimensional microstructures.Nassar, Raja is the author of 'Modelling of Microfabrication Systems' with ISBN 9783540002529 and ISBN 3540002529.

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