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9780824790240

Microlithography

Microlithography
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$139.95
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$139.95
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$113.93
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    78%
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Product details

  • ISBN-13: 9780824790240
  • ISBN: 0824790243
  • Edition: 2
  • Publication Date: 2007
  • Publisher: Taylor & Francis Group

AUTHOR

Suzuki, Kazuaki, Smith, Bruce W.

SUMMARY

Fully revised and updated to cover next generation lithography, the text provides the latest processes, and much new information on nanoimprint.Suzuki, Kazuaki is the author of 'Microlithography ', published 2007 under ISBN 9780824790240 and ISBN 0824790243.

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