1207547
9781884989049
Microengineering and microelectro-mechanical systems (MEMS) are a subject of considerable current interest involving research and development throughout the world. This first volume of a series on this topic reviews and evaluates micro- and nanotechnologies applicable to U.S. Air Force and commercial space systems. It introduces the concept of application-specific integrated microinstrument (ASIM), an intelligent microinstrument.Helvajian, Henry is the author of 'Micro-And Nanotechnology for Space Systems' with ISBN 9781884989049 and ISBN 1884989047.
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