4519059
9780849391385
The 'MEMS Handbook' offers state-of-the-art coverage of microelectromechanical systems, including their design, fabrication & applications, as well as physical modeling.Gad-El-Hak, Mohamed is the author of 'MEMS Design And Fabrication', published 2005 under ISBN 9780849391385 and ISBN 0849391385.
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