1179959
9781402071751
Materials & Process Integration for Mems
by Tay, Francis E. H.
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Product details
- ISBN-13: 9781402071751
- ISBN: 1402071752
- Publisher: Springer
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SUMMARY
These reviews cover the background, tools, and directions to take when choosing fabrication methods and materials for miniaturization projects. The state-of-the-art in nanotechnology is down to the molecular level but that's only what is publicly acknowledged and micro-mechanical systems are changing fast.Tay, Francis E. H. is the author of 'Materials & Process Integration for Mems' with ISBN 9781402071751 and ISBN 1402071752.
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