8262019
9781420055191
Manufacturing Techniques for Microfabrication and Nanotechnology
by Madou, Marc J.
8823
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Product details
- ISBN-13: 9781420055191
- ISBN: 1420055194
- Edition: 1
- Publication Date: 2010
- Publisher: Taylor & Francis Group
AUTHOR
SUMMARY
This textbook focuses on emerging trends in industrial lithography and pattern transfer. It covers photolithography and next generation lithographies and presents a number of subtractive etching techniques, including dry, chemical, and electrochemical wet.Madou, Marc J. is the author of 'Manufacturing Techniques for Microfabrication and Nanotechnology', published 2010 under ISBN 9781420055191 and ISBN 1420055194.
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