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1990185

9781402080203

Introduction To Surface-Micromachining

Introduction To Surface-Micromachining
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Product details

  • ISBN-13: 9781402080203
  • ISBN: 1402080204
  • Publication Date: 2004
  • Publisher: Springer

AUTHOR

Johnstone, Robert W., Parmaswaran, Ash

SUMMARY

This work provides a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components.Johnstone, Robert W. is the author of 'Introduction To Surface-Micromachining ', published 2004 under ISBN 9781402080203 and ISBN 1402080204.

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