3590068
9780201146950
Modular Series on Solid State Devices. This volume is a concise survey of the most up-to-date techniques in the field. It is devoted excusively to processing and its highlighted by careful explanations.Jaeger, Richard C. is the author of 'Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)' with ISBN 9780201146950 and ISBN 0201146959.
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