Name: Integrated Processing for Micro- And Optoelectronics: Proceedings of Symposium d on Integrated Processing for Micro- And Optoelectronics of the 1993 (European ... Research Society Symposia Proceedings)
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ISBN: 9780444819833

by Nissim, Yves I., Katz, Avishay, Rubloff, G. W.

Integrated Processing for Micro- And Optoelectronics: Proceedings of Symposium d on Integrated Processing for Micro- And Optoelectronics of the 1993 (European ... Research Society Symposia Proceedings)

by Nissim, Yves I., Katz, Avishay, Rubloff, G. W.

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ISBN-13: 9780444819833
ISBN: 0444819835
Publisher: Elsevier Science & Technology Books

AUTHOR

Nissim, Yves I., Katz, Avishay, Rubloff, G. W.

SUMMARY

These proceedings focus on the technology application driving forces for multichamber approaches to semiconductor process sequences, otherwise called cluster tools or integrated processing, and present leading-edge research results upon which these manufacturing technologies are built.Nissim, Yves I. is the author of 'Integrated Processing for Micro- And Optoelectronics: Proceedings of Symposium d on Integrated Processing for Micro- And Optoelectronics of the 1993 (European ... Research Society Symposia Proceedings)' with ISBN 9780444819833 and ISBN 0444819835.

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