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66953145

9783031014246

Hf-Based High-K Dielectrics : Process Development, Performance Characterization, and Reliability

Hf-Based High-K Dielectrics : Process Development, Performance Characterization, and Reliability
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Product details

  • ISBN-13: 9783031014246
  • ISBN: 3031014243
  • Publication Date: 2007
  • Publisher: Springer International Publishing AG

AUTHOR

Kim, Young Hee, Lee, Jack C.

SUMMARY

Kim, Young Hee is the author of 'Hf-Based High-K Dielectrics : Process Development, Performance Characterization, and Reliability', published 2007 under ISBN 9783031014246 and ISBN 3031014243.

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