887415
9780815512806
Handbook of Sputter Deposition Technology Principles, Technology and Applications
by Wasa, Kiyotaka, Hayakawa, Shigeru, Haber, Shigeru
About this item
- Condition: Good
- Provider: Bonita
- Provider Rating: 0%
- Ships From: Multiple Locations
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- Comments: Access codes and supplements are not guaranteed with used items. May be an ex-library book.
Product details
- ISBN-13: 9780815512806
- ISBN: 0815512805
- Publisher: William Andrew, Incorporated
AUTHOR
SUMMARY
A concise, comprehensive overview of sputter deposition technology, a key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production, and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.Wasa, Kiyotaka is the author of 'Handbook of Sputter Deposition Technology Principles, Technology and Applications' with ISBN 9780815512806 and ISBN 0815512805.
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