885803
9780815511991
Handbook of Ion Beam Processing Technology Principles, Deposition, Film Modification and Synthesis
by Cuomo, Jerome J., Cuomo, Jerome J., Rossnagel, Stephen M.
31245
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Product details
- ISBN-13: 9780815511991
- ISBN: 081551199X
- Publisher: William Andrew, Incorporated
AUTHOR
SUMMARY
Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.Cuomo, Jerome J. is the author of 'Handbook of Ion Beam Processing Technology Principles, Deposition, Film Modification and Synthesis' with ISBN 9780815511991 and ISBN 081551199X.
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