1953630
9783540200567
This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.Basting, Dirk is the author of 'Excimer Laser Technology', published 2005 under ISBN 9783540200567 and ISBN 3540200568.
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