5863812
9780387751085
Thin film deposition is the most critical of the processes used to manufacture high tech devices. Morphology and microstructure of thin films directly controls their optical, magnetic, and electrical properties. This book focuses on modeling and simulations used in research on the morphological evolution during film growth.Pelliccione, Matthew is the author of 'Evolution of Thin-Film Morphology', published 2007 under ISBN 9780387751085 and ISBN 0387751084.
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