38377435
9781489925688
Dry Etching for VLSI (Updates in Applied Physics and Electrical Technology)
by A.J. van Roosmalen, S.J.H. Brader, J.A.G. Baggerman
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- Condition: New
- Provider: LightningBooks
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Product details
- ISBN-13: 9781489925688
- ISBN: 1489925686
- Edition: Softcover reprint of the original 1st ed. 1991
- Publication Date: 2013
- Publisher: Springer
AUTHOR
SUMMARY
A.J. van Roosmalen is the author of 'Dry Etching for VLSI (Updates in Applied Physics and Electrical Technology)', published 2013 under ISBN 9781489925688 and ISBN 1489925686.
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