5152626
9780470013601
Dielectric Films for Advanced Microelectronics
by Green, Martin, Baklanov, Mikhail, Maex, Karen
31245
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Product details
- ISBN-13: 9780470013601
- ISBN: 0470013605
- Publication Date: 2007
- Publisher: Wiley & Sons, Incorporated, John
AUTHOR
SUMMARY
The topic of thin films is an area of importance in materials science, electrical engineering, and applied solid state physics. Presents developments in the area of dielectric films for advanced microelectronic applications, this book explains material science of dielectric films and their problem for device operation.Green, Martin is the author of 'Dielectric Films for Advanced Microelectronics ', published 2007 under ISBN 9780470013601 and ISBN 0470013605.
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