486996
9781402076886
An introduction to the parylene family polymers, their deposition apparatus and their film properties. It should serve as a useful reference source and handbook for scientists and engineers interesting in depositing high quality parylene thin films.Fortin, Jeffrey B. is the author of 'Chemical Vapor Deposition Polymerization The Growth and Properties of Parylene Thin Films' with ISBN 9781402076886 and ISBN 1402076886.
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