487043
9783540431817
Chemical-Mechanical Planarization of Semiconductor Materials
by Oliver, M. R.
31245
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Product details
- ISBN-13: 9783540431817
- ISBN: 3540431810
- Publisher: Springer
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SUMMARY
This is a comprehensive review of CMP (Chemical Mechanical Planarization) technology, which is now a major part of state-of-the-art semiconductor technology. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.Oliver, M. R. is the author of 'Chemical-Mechanical Planarization of Semiconductor Materials' with ISBN 9783540431817 and ISBN 3540431810.
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