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9780444516169

Analysis and Design Principles of MEMS Devices

Analysis and Design Principles of MEMS Devices
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Product details

  • ISBN-13: 9780444516169
  • ISBN: 0444516166
  • Publication Date: 2005
  • Publisher: Elsevier Science & Technology Books

AUTHOR

Bao, Minhang

SUMMARY

While this volume deals broadly with the analysis and design principles behind the construction of MEMS systems its main focus is on microdynamics, with coverage of such topics as the mechanics of beam and diaphragm structures, air damping, and the effects of electrical excitation on capacitive sensing.Bao, Minhang is the author of 'Analysis and Design Principles of MEMS Devices', published 2005 under ISBN 9780444516169 and ISBN 0444516166.

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