An Introduction to Semiconductor Microtechnology

This introduction to semiconductor microtechnology covers the structure & manufacture of semiconductor devices. The Second Edition has been updated to reflect advances in the design & fabrication of semiconductor devices. Provides background material on semiconductor microtechnology & describes the properties of semiconductor materials & each step of the manufacturing process. Includes more photographs & larger diagrams; also provides instructional objectives & self-evaluation questions at the beginning of each chapter & problems at the end.Morgan, D. V. is the author of 'An Introduction to Semiconductor Microtechnology', published 1983 under ISBN 9780471901488 and ISBN 0471901482.